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1 mm厚のガラス基板の水平搬送や保管に使用するカセットについて規定する。
The purpose of this Test Method is to provide a standardized test method for measuring the density of slurries
SEMI E53 — Event Reporting
1 — Specification for Product Time Measurement in GEM 300 Production Equipment
D02400 - SEMI D24 - FPD用ガラス基板の仕様 StdPbc-0218 1 mm厚のガラス基板の水平搬送や保管に使用するカセットについて規定する。NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Flat Panel Display Factory Automation Global Technical Committee2006516global Audits and Reviews Subcommittee20066www. semi. org20002 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain