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SEMI C82 — Test Method for Particle Removal Performance of Liquid Filter Rated 20 to 50 nm With Liquid-Borne Particle Counter
1) for the measurement of contamination on the wafer surface
are not covered
controlled
E04600 - SEMI E46 - Test Method for the Determination of Organic Contamination from Minienvironments Using Ion Mobility Spectrometry (IMS) StdPbc-0319 SEMI C82 — Test MethodNOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Test Method is to provide an analytical procedureion mobility spectrometry (IMS)for the determination of organic contamination from minienvironments which has the capability of testing their