E13000 - SEMI E130 - Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) StdTier-Tier1 5 µm範囲）に関係し，気相分析を用いた分析テクニックを述べる。

5 µm範囲）に関係し，気相分析を用いた分析テクニックを述べる。

本測定方法は，

SEMI E39 — Specification for Object Services Standard (OSS)

SEMI E19 — Specification for Standard Mechanical Interface (SMIF)

E13000 - SEMI E130 - Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) StdTier-Tier1 5 µm範囲）に関係し，気相分析を用いた分析テクニックを述べる。This Standard establishes a Prober Specific Equipment Model for prober equipment deployed in a factory adhering to the Global Joint Guidance for 300 mm Standards (PSEM300). The PSEM300 consists of equipment characteristics and behaviors that apply to this class of equipment and are required to be implemented. The intent of this Standard is to facilitate the integration of prober equipment into an automated semiconductor factory. This Standard