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It expands the GEM standard requirements and capabilities in the areas of state models (stocker controller
SEMI E5-88 (technical revision)
1 This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces
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M04500 - SEMI M45 - 300 mmウェーハシッピングシステムに関する暫定仕様 Revision:SEMI M45-1110 - Superseded It expands the GEM standardGlobal Silicon Wafer CommitteeEuropean Silicon Wafer Committee200343European Regional Standards Committee20036www. semi. org2003720013 300mm Referenced SEMI Standards SEMI M31 Provisional Mechanical Specifications for Front Opening Shipping Box Used to Transport and Ship 300 mm Wafers SEMI T3 Specification for Wafer Box Labels