F01200 - SEMI F12 - Test Method to Determine the Sealing Capabilities of Fittings, Made of Fluorocarbon Material, after Being Subjected to a Heat Cycle StdTpc-Device Tracking Procedures to obtain a representative

Procedures to obtain a representative value of roughness for a surface are specified

it enables interoperability of load ports and carriers and it aims to promote the automation using 450 TFC

The procedures of this Guide can be used to profile through p-n junctions

EPT assists SEMI E79 by providing task-level detail of the equipment or module’s current activity

F01200 - SEMI F12 - Test Method to Determine the Sealing Capabilities of Fittings, Made of Fluorocarbon Material, after Being Subjected to a Heat Cycle StdTpc-Device Tracking Procedures to obtain a representativeNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This method provides a uniform procedure to determine the sealing capabilities of fluorocarbon resin fittings, after they have been subjected to an elevated ambient temperature and cooled to room temperature (hereafter