PV00100 - SEMI PV1 - Test Method for Measuring Trace Elements in Silicon Feedstock for Silicon Solar Cells by High-Mass Resolution Glow Discharge Mass Spectrometry StdPbc-0116 for plastic molded Single Outline

for plastic molded Single Outline Integrated Circuit (SOIC) semiconductor packages

SEMI D60-0818 (Reapproved 0224)

This Test Method is referred to as a preferred method of RF power measurement for conforming to SEMI E113

The Test Method is based on a light sectioning technique (see Related Information 1) where patterns of line segments or spots of light are projected onto a wafer surface and saw marks as well as the waviness peaks and valleys are oriented perpendicular to the direction of wafer transport

PV00100 - SEMI PV1 - Test Method for Measuring Trace Elements in Silicon Feedstock for Silicon Solar Cells by High-Mass Resolution Glow Discharge Mass Spectrometry StdPbc-0116 for plastic molded Single OutlineThis Standard was technically approved by the Photovoltaic Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 18, 2017. Available at www. semiviews. org and www. semi. org in March 2018; originally published March 2009; previously published February 2011. This Test Method can be used to monitor the bulk trace level elemental impurities in silicon feedstock that affect the