D02800 - SEMI D28 - Specification for Mechanical Interface Between Flat Panel Display Material Handling Equipment and Tool Port, Using Automated Guided Vehicle (AGV), Rail Guided Vehicle (RGV), and Manual Guided Vehicle (MGV) StdPbc-0418 SEMI D21-1000 (technical revision)

SEMI D21-1000 (technical revision)

SEMI D3 — Quality Area of FPD Substrates

to be published October 2000

The purpose of defining a comprehensive training system is to provide the basis for a common understanding of the required elements to effectively deliver training

D02800 - SEMI D28 - Specification for Mechanical Interface Between Flat Panel Display Material Handling Equipment and Tool Port, Using Automated Guided Vehicle (AGV), Rail Guided Vehicle (RGV), and Manual Guided Vehicle (MGV) StdPbc-0418 SEMI D21-1000 (technical revision)This Standard was technically approved by the Flat Panel Display Factory Automation Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. Available at www. semi. org in July 2008; originally published November 2001. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or