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SEMI E158 — Specification for Mechanical Features of Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling
FPD基板が静的に保持された場合の物理的搬送に関する用語とその定義を定める。
本文書の目的は，半導体産業で使用されるジメチルスルホキシドに対する要求事項を標準化し，また，要求事項に対して立証するためのテスト手順を標準化することである。このテスト方法は統計的に有効な結果を表すことが明らかとなっている。
The purpose of this Standard is to provide recommendations for developing and delivering equipment training so that it is performance-based
C01900 - SEMI C19 - Specification for Acetone Revision:SEMI C19-0514 - Superseded SEMI E158 — Specification forNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to standardize requirements for acetone used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically
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